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Studies of oxide to polymer bonding for 3D IC.
- Source :
- Nanoelectronics Conference (INEC), 2011 IEEE 4th International; 2011, p1-2, 2p
- Publication Year :
- 2011
Details
- Language :
- English
- ISBNs :
- 9781457703799
- Database :
- Complementary Index
- Journal :
- Nanoelectronics Conference (INEC), 2011 IEEE 4th International
- Publication Type :
- Conference
- Accession number :
- 80342880
- Full Text :
- https://doi.org/10.1109/INEC.2011.5991641