MEMS components with perfectly protected edges and corners in Si{110} wafers.

Details

Language :

English

ISBNs :

9781457713606

Database :

Complementary Index

Journal :

2011 International Symposium on Micro-NanoMechatronics & Human Science (MHS)

Publication Type :

Conference

Accession number :

80335151

Full Text :

https://doi.org/10.1109/MHS.2011.6102158