Simple current and capacitance methods for bulk finFET height extraction and correlation to device variability.

Details

Language :

English

ISBNs :

9781424485260

Database :

Complementary Index

Journal :

2011 IEEE International Conference on Microelectronic Test Structures (ICMTS)

Publication Type :

Conference

Accession number :

80335069

Full Text :

https://doi.org/10.1109/ICMTS.2011.5976879