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Characterization of SrTiO3-based MIM capacitors grown by using different precursors and growth temperatures.
- Source :
- 2011 Spanish Conference on Electron Devices (CDE); 2011, p1-4, 4p
- Publication Year :
- 2011
Details
- Language :
- English
- ISBNs :
- 9781424478637
- Database :
- Complementary Index
- Journal :
- 2011 Spanish Conference on Electron Devices (CDE)
- Publication Type :
- Conference
- Accession number :
- 80299248
- Full Text :
- https://doi.org/10.1109/SCED.2011.5744209