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Characterization of SrTiO3-based MIM capacitors grown by using different precursors and growth temperatures.

Authors :
Garcia, H.
Casta?n, H.
Go?mez, A.
Duen?as, S.
Bailo?n, L.
Kukli, K.
Kariniemi, M.
Kemell, M.
Niinisto?, J.
Ritala, M.
Leskela?, M.
Source :
2011 Spanish Conference on Electron Devices (CDE); 2011, p1-4, 4p
Publication Year :
2011

Details

Language :
English
ISBNs :
9781424478637
Database :
Complementary Index
Journal :
2011 Spanish Conference on Electron Devices (CDE)
Publication Type :
Conference
Accession number :
80299248
Full Text :
https://doi.org/10.1109/SCED.2011.5744209