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The theoretical investigation of the effect of adhesive layers used in microassembly on the dynamic response of a microaccelerometer.

Authors :
Taran, B.
Amoozegar, Sh.
Bayaz, R. Nadafi Dasht
Barazandeh, F.
Source :
2011 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP); 2011, p1-6, 6p
Publication Year :
2011

Details

Language :
English
ISBNs :
9781612849058
Database :
Complementary Index
Journal :
2011 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP)
Publication Type :
Conference
Accession number :
80283168

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