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45nm Yield model optimization.

Authors :
Walsh, B.L.
Colt, J.
Poindexter, D.
Joseph, T.
Source :
Advanced Semiconductor Manufacturing Conference (ASMC), 2011 22nd Annual IEEE/SEMI; 2011, p1-4, 4p
Publication Year :
2011

Details

Language :
English
ISBNs :
9781612844084
Database :
Complementary Index
Journal :
Advanced Semiconductor Manufacturing Conference (ASMC), 2011 22nd Annual IEEE/SEMI
Publication Type :
Conference
Accession number :
80254086
Full Text :
https://doi.org/10.1109/ASMC.2011.5898162