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Microfabricated PMN-PT on silicon cantilevers with improved static and dynamic piezoelectric actuation: Development, characterization and control.

Authors :
Ivan, I.A.
Agnus, J.
Rakotondrabe, M.
Lutz, P.
Chaillet, N.
Source :
IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM), 2011; 2011, p403-408, 6p
Publication Year :
2011

Details

Language :
English
ISBNs :
9781457708381
Database :
Complementary Index
Journal :
IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM), 2011
Publication Type :
Conference
Accession number :
80253344
Full Text :
https://doi.org/10.1109/AIM.2011.6027118
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