Sidewall epitaxial piezoresistor process for in-plane sensing applications.

Authors :: Barlian, A.A.
Harjee, N.
Mukundan, V.
Fung, T.H.
Park, S.-J.
Pruitt, B.L.
Source :: 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems; 2008, p331-334, 4p
Publication Year :: 2008

Language :: English
ISBNs :: 9781424417926
Database :: Complementary Index
Journal :: 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems
Publication Type :: Conference
Accession number :: 79880158
Full Text :: https://doi.org/10.1109/MEMSYS.2008.4443660