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Film stress and substrate curvature.
- Source :
- Thin Film Materials; 2003, p86-153, 68p
- Publication Year :
- 2003
Details
- Language :
- English
- ISBNs :
- 9780521529778
- Database :
- Complementary Index
- Journal :
- Thin Film Materials
- Publication Type :
- Book
- Accession number :
- 76948576
- Full Text :
- https://doi.org/10.1017/CBO9780511754715.003