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Investigation on the oxide field dependence of hole trapping and interface state generation in SiO2 layers using homogeneous nonavalanche injection of holes.

Authors :
Schwerin, A. V.
Heyns, M. M.
Weber, W.
Source :
Journal of Applied Physics; 6/15/1990, Vol. 67 Issue 12, p7595, 7p
Publication Year :
1990

Abstract

Investigates the oxide field dependence of hole trapping and interface state generation in silicon oxide layers using homogeneous nonavalanche injection of holes. Factors that influence the presence of very high fields in metal-oxide-semiconductor transistor; Details on the experiment; Discussion on the result of the study.

Details

Language :
English
ISSN :
00218979
Volume :
67
Issue :
12
Database :
Complementary Index
Journal :
Journal of Applied Physics
Publication Type :
Academic Journal
Accession number :
7669523
Full Text :
https://doi.org/10.1063/1.345827