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Role of heat transfer and fluid flow in the chemical vapor deposition of diamond.
- Source :
- Journal of Applied Physics; 9/1/1990, Vol. 68 Issue 5, p2424, 9p, 1 Black and White Photograph, 3 Diagrams, 4 Charts, 4 Graphs
- Publication Year :
- 1990
-
Abstract
- Presents a study that investigated the role of fluid flow and heat transfer in the chemical vapor deposition of diamond films. Methodology; Effect of fluid flow and heat transfer on the quality of the diamond films; Influence of fluid flow and heat transfer on the rate of chemical vapor deposition.
- Subjects :
- DIAMONDS
THIN films
CHEMICAL vapor deposition
FLUID dynamics
HEAT transfer
Subjects
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 68
- Issue :
- 5
- Database :
- Complementary Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 7669000
- Full Text :
- https://doi.org/10.1063/1.346502