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Pulsed laser induced epitaxial crystallization of carbon–silicon alloys.

Authors :
Kramer, K. M.
Thompson, M. O.
Source :
Journal of Applied Physics; 4/15/1996, Vol. 79 Issue 8, p4118, 6p, 1 Black and White Photograph, 4 Graphs
Publication Year :
1996

Abstract

Provides information on a study which examined the non-equilibrium carbon-silicon alloys produced by laser induced epitaxy from ion implanted silicon. Epitaxial crystallization of carbon-silicon alloys; Application of pulsed laser in epitaxial crystallization; Use of transmission electron microscopy and infrared spectroscopy in analyzing carbon-silicon alloys.

Details

Language :
English
ISSN :
00218979
Volume :
79
Issue :
8
Database :
Complementary Index
Journal :
Journal of Applied Physics
Publication Type :
Academic Journal
Accession number :
7661588
Full Text :
https://doi.org/10.1063/1.361775