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Pulsed laser induced epitaxial crystallization of carbon–silicon alloys.
- Source :
- Journal of Applied Physics; 4/15/1996, Vol. 79 Issue 8, p4118, 6p, 1 Black and White Photograph, 4 Graphs
- Publication Year :
- 1996
-
Abstract
- Provides information on a study which examined the non-equilibrium carbon-silicon alloys produced by laser induced epitaxy from ion implanted silicon. Epitaxial crystallization of carbon-silicon alloys; Application of pulsed laser in epitaxial crystallization; Use of transmission electron microscopy and infrared spectroscopy in analyzing carbon-silicon alloys.
- Subjects :
- EPITAXY
CARBON
SILICON alloys
ION implantation
Subjects
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 79
- Issue :
- 8
- Database :
- Complementary Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 7661588
- Full Text :
- https://doi.org/10.1063/1.361775