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Investigation of bias enhanced nucleation of diamond on silicon.
- Source :
- Journal of Applied Physics; 4/15/1996, Vol. 79 Issue 8, p4388, 9p, 2 Black and White Photographs, 1 Diagram, 14 Graphs
- Publication Year :
- 1996
-
Abstract
- Presents a study which examined bias enhanced nucleation of microwave chemical vapor deposited diamond films on silicon. Experimental details; Results; Discussion.
- Subjects :
- NUCLEATION
DIAMOND thin films
CHEMICAL vapor deposition
SILICON
Subjects
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 79
- Issue :
- 8
- Database :
- Complementary Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 7660890
- Full Text :
- https://doi.org/10.1063/1.361864