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Surface morphology and electric conductivity of epitaxial Cu(100) films grown on H-terminated Si(100).

Authors :
Krastev, E. T.
Voice, L. D.
Tobin, R. G.
Source :
Journal of Applied Physics; 5/1/1996, Vol. 79 Issue 9, p6865, 7p, 1 Chart, 8 Graphs
Publication Year :
1996

Abstract

Investigates the crystal structure, surface morphology and electrical conductance of copper films grown on hydrogen-terminated silicon(100). Techniques used in determining film structure and surface morphology; Description on atomic force microscopic images obtained from the samples; Measurements of four-wire direct current resistance on selected films during deposition.

Details

Language :
English
ISSN :
00218979
Volume :
79
Issue :
9
Database :
Complementary Index
Journal :
Journal of Applied Physics
Publication Type :
Academic Journal
Accession number :
7659974
Full Text :
https://doi.org/10.1063/1.361508