Back to Search
Start Over
Surface morphology and electric conductivity of epitaxial Cu(100) films grown on H-terminated Si(100).
- Source :
- Journal of Applied Physics; 5/1/1996, Vol. 79 Issue 9, p6865, 7p, 1 Chart, 8 Graphs
- Publication Year :
- 1996
-
Abstract
- Investigates the crystal structure, surface morphology and electrical conductance of copper films grown on hydrogen-terminated silicon(100). Techniques used in determining film structure and surface morphology; Description on atomic force microscopic images obtained from the samples; Measurements of four-wire direct current resistance on selected films during deposition.
- Subjects :
- CRYSTALLOGRAPHY
THIN films
ATOMIC force microscopy
Subjects
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 79
- Issue :
- 9
- Database :
- Complementary Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 7659974
- Full Text :
- https://doi.org/10.1063/1.361508