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Surface hardness enhancement in ion-implanted amorphous carbon.

Authors :
Lee, D. H.
Park, B.
Poker, D. B.
Riester, L.
Feng, Z. C.
Baglin, J. E. E.
Source :
Journal of Applied Physics; 8/1/1996, Vol. 80 Issue 3, p1480, 5p, 6 Graphs
Publication Year :
1996

Abstract

Examines surface hardness enhancement in ion-implanted amorphous carbon. Experimental details; Techniques and methodologies used for compositional analysis including Rutherford backscattering; Results and discussion.

Subjects

Subjects :
HARDNESS
CARBON
AMORPHOUS substances
BACKSCATTERING

Details

Language :
English
ISSN :
00218979
Volume :
80
Issue :
3
Database :
Complementary Index
Journal :
Journal of Applied Physics
Publication Type :
Academic Journal
Accession number :
7658686
Full Text :
https://doi.org/10.1063/1.363017
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