X-ray reciprocal-space mapping of strain relaxation and tilting in linearly graded InAlAs buffers.

Authors :: Olsen, J. A.
Hu, E. L.
Lee, S. R.
Fritz, I. J.
Howard, A. J.
Hammons, B. E.
Tsao, J. Y.
Source :: Journal of Applied Physics; 4/1/1996, Vol. 79 Issue 7, p3578, 7p, 2 Diagrams, 3 Charts, 3 Graphs
Publication Year :: 1996
Abstract: Presents a study which examined the extent of relaxation and orientation of linearly graded In[subx]Al[sub1-x]As buffers grown on gallium arsenide using a novel x-ray diffraction reciprocal-space mapping technique. Theoretical background; Description of the experimental setup; Results.

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