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Computer simulation of damage processes during ion implantation.
- Source :
- Journal of Applied Physics; 10/1/1987, Vol. 62 Issue 7, p2733, 5p, 4 Graphs
- Publication Year :
- 1987
-
Abstract
- Presents a study that applied computer simulation to determine damage processes during ion implantation. Background on the Marlowe computer code; Development of a computational model for the code; Analysis of the results of impact-collision ion scattering spectroscopy.
- Subjects :
- COMPUTER simulation
ION implantation
SPECTRUM analysis
Subjects
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 62
- Issue :
- 7
- Database :
- Complementary Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 7656298
- Full Text :
- https://doi.org/10.1063/1.339400