Precise determination of aluminum content in AlGaAs.

Authors :: Chang, K. H.
Lee, C. P.
Wu, J. S.
Liu, D. G.
Liou, D. C.
Wang, M. H.
Chen, L. J.
Marais, Mario A.
Source :: Journal of Applied Physics; 11/1/1991, Vol. 70 Issue 9, p4877, 6p
Publication Year :: 1991
Abstract: Determines the aluminum (Al) composition of AlGaAs by various methods. Preparation of the AlGaAs layers; Way to obtain the Al mole fraction; Purpose of the reflection high-energy electron diffraction intensity oscillation; Formula for the Al mole fraction of the AlGaAs from the photoluminescence method.