Interaction of ambient gas and meniscus surface during growth of edge-defined film-fed growth polycrystalline silicon samples.

Reports on the interaction of ambient gas and meniscus surface during growth of edge-defined film-fed growth (EFG) polycrystalline silicon samples. Impact of carbon monoxide and carbon dioxide on carbon content of the nonagons; Significance of the presence of oxygen in edge-defined film-fed grown polycrystalline silicon ribbon; Depth profiles of oxygen and carbon for EFG.