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Relationship between electrical properties and structure in uniaxially oriented polycrystalline silicon films.
- Source :
- Journal of Applied Physics; 2/1/1992, Vol. 71 Issue 3, p1462, 7p, 10 Graphs
- Publication Year :
- 1992
-
Abstract
- Presents a study that prepared undoped polycrystalline silicon films on a fused quartz substrate as a function of the radio frequency power and deposition temperature by a plasma-enhanced chemical vapor deposition method. Details of the experiment; Results and discussion; Conclusion.
- Subjects :
- POLYCRYSTALS
SILICON
THIN films
QUARTZ
Subjects
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 71
- Issue :
- 3
- Database :
- Complementary Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 7651519
- Full Text :
- https://doi.org/10.1063/1.351239