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Transmission electron microscopy and scanning transmission electron microscope analysis of the effects of thermal processing on the structural integrity of GaInAs/GaInAsP multilayers.
- Source :
- Journal of Applied Physics; 5/1/1993, Vol. 73 Issue 9, p4297, 8p
- Publication Year :
- 1993
-
Abstract
- Presents a study that reported the structural characterization by electron microscopy of a metalorganic chemical vapor deposition grown GaInAs/GaInAsP multiple-quantum-well structure undergoing a blue shift in luminescence wavelength upon thermal processing, as part of a multistage epitaxial growth process. Experimental details; Results of the study; Details of stem mapping of blue-shifted multilayers.
- Subjects :
- ELECTRON microscopy
CHEMICAL vapor deposition
EPITAXY
GALLIUM
INDIUM
Subjects
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 73
- Issue :
- 9
- Database :
- Complementary Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 7649100
- Full Text :
- https://doi.org/10.1063/1.352812