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In situ neutron diffraction study of lattice deformation during oxygen precipitation in silicon.
- Source :
- Journal of Applied Physics; 8/1/1991, Vol. 70 Issue 3, p1276, 5p, 1 Chart, 4 Graphs
- Publication Year :
- 1991
-
Abstract
- Presents an in situ neutron diffraction study of lattice deformation during oxygen precipitation in silicon. Experiment details; Results and discussion; Conclusion.
- Subjects :
- NEUTRON diffraction
LATTICE theory
SILICON
OXYGEN
PRECIPITATION (Chemistry)
Subjects
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 70
- Issue :
- 3
- Database :
- Complementary Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 7641662
- Full Text :
- https://doi.org/10.1063/1.350336