X-ray diffraction analysis of Si1-xGex/Si superlattices.

Authors :: Mai, Z. H.
Ouyang, J. T.
Cui, S. F.
Li, J. H.
Wang, C. Y.
Li, C. R.
Source :: Journal of Applied Physics; 10/15/1992, Vol. 72 Issue 8, p3474, 6p, 4 Charts, 6 Graphs
Publication Year :: 1992
Abstract: Presents a study which investigated the Si[sub1-subx]Ge[subx]/Si strained-layer superlattices grown by molecular beam epitaxy on silicon substrates by x-ray double crystal diffraction and x-ray grazing incidence diffraction. Components of the superlattices; Discussion on lattice relaxation; Results of double-crystal diffraction.