Laser-induced fluorescence measurement and analytical model for the reaction probability of CF2 on Si.

Authors :: Thoman, J. W.
Suzuki, K.
Kable, S. H.
Steinfeld, J. I.
Source :: Journal of Applied Physics; 10/15/1986, Vol. 60 Issue 8, p2775, 3p, 1 Chart, 1 Graph
Publication Year :: 1986
Abstract: Presents a study that investigated an analytical model for concentration profiles of reactive gas-phase species adjacent to surfaces, determined by optical probe techniques. Measurements of carbon-fluoride detected by laser-induced fluorescence; Conditions under which the model is applicable; Interpretation of the measurements.

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