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Crystallization in fluorinated and hydrogenated amorphous silicon thin films.
- Source :
- Journal of Applied Physics; 6/15/1994, Vol. 75 Issue 12, p7875, 6p, 1 Black and White Photograph, 1 Chart, 1 Graph
- Publication Year :
- 1994
-
Abstract
- Examines the amorphous-to-crystalline transition of amorphous silicon thin films containing fluorine and hydrogen using the transmission electron microscopy. Experimental procedures; Experimental results; Discussion of findings.
- Subjects :
- CRYSTALLIZATION
THIN films
SILICON
TRANSMISSION electron microscopy
Subjects
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 75
- Issue :
- 12
- Database :
- Complementary Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 7633661
- Full Text :
- https://doi.org/10.1063/1.356572