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Sol-gel silicate thin-film electronic properties.
- Source :
- Journal of Applied Physics; 4/15/1991, Vol. 69 Issue 8, p4404, 5p
- Publication Year :
- 1991
-
Abstract
- Identifies several factors affecting the thin-film electronic properties of sol-gel-derived silicate thin films. Experimental procedures involved in the study; Description of the dielectric integrity exhibited by sol-gel dielectrics; Effect of water to silicon alkoxide ratio on the film's electronic and physical properties.
- Subjects :
- ELECTRIC properties of thin films
SILICATES
DIELECTRICS
SOLUTION (Chemistry)
Subjects
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 69
- Issue :
- 8
- Database :
- Complementary Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 7625523
- Full Text :
- https://doi.org/10.1063/1.348366