Germanium Surface Conditioning and Passivation.

MLA

Reinhardt, Karen A., and Richard F. Reidy. “Germanium Surface Conditioning and Passivation.” Handbook for Cleaning for Semiconductor Manufacturing: Fundamentals & Applications, Jan. 2010, pp. 429–72. EBSCOhost, https://doi.org/10.1002/9781118071748.ch12.

APA

Reinhardt, K. A., & Reidy, R. F. (2010). Germanium Surface Conditioning and Passivation. Handbook for Cleaning for Semiconductor Manufacturing: Fundamentals & Applications, 429–472. https://doi.org/10.1002/9781118071748.ch12

Chicago

Reinhardt, Karen A., and Richard F. Reidy. 2010. “Germanium Surface Conditioning and Passivation.” Handbook for Cleaning for Semiconductor Manufacturing: Fundamentals & Applications, January, 429–72. doi:10.1002/9781118071748.ch12.