Cryopumps for evacuating space simulation chambers.

Authors :: Schäfer, G.
Häfner, H.-U.
Source :: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1987, Vol. 5 Issue 4, p2359-2362, 4p
Publication Year :: 1987

Language :: English
ISSN :: 07342101
Volume :: 5
Issue :: 4
Database :: Complementary Index
Journal :: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films
Publication Type :: Academic Journal
Accession number :: 74413807
Full Text :: https://doi.org/10.1116/1.574452