Influence of pattern density in nanoimprint lithography.

Authors :: Gourgon, C.
Perret, C.
Micouin, G.
Lazzarino, F.
Tortai, J. H.
Joubert, O.
Grolier, J.-P. E.
Source :: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2003, Vol. 21 Issue 1, p98-105, 8p
Publication Year :: 2003

Language :: English
ISSN :: 10711023
Volume :: 21
Issue :: 1
Database :: Complementary Index
Journal :: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures
Publication Type :: Academic Journal
Accession number :: 74345961
Full Text :: https://doi.org/10.1116/1.1532735