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Nanocrystal metal-oxide-semiconductor memories obtained by chemical vapor deposition of Si nanocrystals.
- Source :
- Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2002, Vol. 20 Issue 5, p2075-2079, 5p
- Publication Year :
- 2002
Details
- Language :
- English
- ISSN :
- 10711023
- Volume :
- 20
- Issue :
- 5
- Database :
- Complementary Index
- Journal :
- Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures
- Publication Type :
- Academic Journal
- Accession number :
- 74345645
- Full Text :
- https://doi.org/10.1116/1.1508804