Characterization of Cu surface cleaning by hydrogen plasma.

Authors :: Baklanov, M. R.
Shamiryan, D. G.
Tökei, Zs.
Beyer, G. P.
Conard, T.
Vanhaelemeersch, S.
Maex, K.
Source :: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2001, Vol. 19 Issue 4, p1201-1211, 11p
Publication Year :: 2001

Language :: English
ISSN :: 10711023
Volume :: 19
Issue :: 4
Database :: Complementary Index
Journal :: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures
Publication Type :: Academic Journal
Accession number :: 74345077
Full Text :: https://doi.org/10.1116/1.1387084