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Electrical properties of molecular beam epitaxially grown AlxGa1-xSbyAs1-y and its application in InP-based high electron mobility transistors.

Authors :
Cai, W. Z.
Moshegov, N. T.
Mayer, T. S.
Miller, D. L.
Source :
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2001, Vol. 19 Issue 4, p1529-1535, 7p
Publication Year :
2001

Details

Language :
English
ISSN :
10711023
Volume :
19
Issue :
4
Database :
Complementary Index
Journal :
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures
Publication Type :
Academic Journal
Accession number :
74345023
Full Text :
https://doi.org/10.1116/1.1376382