Effects of annealing of (Ba,Sr)RuO3 bottom electrodes on the electrical properties of (Ba,Sr)TiO3 thin films.

Details

Language :

English

ISSN :

10711023

Volume :

19

Issue :

1

Database :

Complementary Index

Journal :

Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures

Publication Type :

Academic Journal

Accession number :

74344801

Full Text :

https://doi.org/10.1116/1.1333079