In situ cleaning of microfabricated field emitter cathodes.

Authors :: Schwoebel, P. R.
Olson, R. T.
Panitz, J. A.
Brodie, A. D.
Source :: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2000, Vol. 18 Issue 5, p2579-2582, 4p
Publication Year :: 2000

Language :: English
ISSN :: 10711023
Volume :: 18
Issue :: 5
Database :: Complementary Index
Journal :: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures
Publication Type :: Academic Journal
Accession number :: 74344553
Full Text :: https://doi.org/10.1116/1.1288199