Effect of oxygen plasma exposure of porous spin-on-glass films.

Authors :: Kondoh, E.
Asano, T.
Nakashima, A.
Komatu, M.
Source :: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2000, Vol. 18 Issue 3, p1276-1280, 5p
Publication Year :: 2000

Language :: English
ISSN :: 10711023
Volume :: 18
Issue :: 3
Database :: Complementary Index
Journal :: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures
Publication Type :: Academic Journal
Accession number :: 74344432
Full Text :: https://doi.org/10.1116/1.591374