Sheath expansion in a drifting, nonuniform plasma.

Authors :: Keidar, M.
Brown, I. G.
Source :: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1999, Vol. 17 Issue 6, p2648-2650, 3p
Publication Year :: 1999

Language :: English
ISSN :: 10711023
Volume :: 17
Issue :: 6
Database :: Complementary Index
Journal :: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures
Publication Type :: Academic Journal
Accession number :: 74344075
Full Text :: https://doi.org/10.1116/1.591040