Influences of the [(Ba,Sr)TiO3]-modified RuO2 interface on the dielectric constant and current-voltage characteristics.

Details

Language :

English

ISSN :

10711023

Volume :

15

Issue :

4

Database :

Complementary Index

Journal :

Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures

Publication Type :

Academic Journal

Accession number :

74342456

Full Text :

https://doi.org/10.1116/1.589510