Coverage-dependent etching pathways for Br-GaAs(110).

Authors :: Brake, J.
Cha, C. Y.
Han, B. Y.
Owens, D. W.
Weaver, J. H.
Source :: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1997, Vol. 15 Issue 3, p670-674, 5p
Publication Year :: 1997

Language :: English
ISSN :: 10711023
Volume :: 15
Issue :: 3
Database :: Complementary Index
Journal :: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures
Publication Type :: Academic Journal
Accession number :: 74342308
Full Text :: https://doi.org/10.1116/1.589367