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Improved focusing-and-deflection columns.
- Source :
- Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1995, Vol. 13 Issue 4, p1496-1507, 12p
- Publication Year :
- 1995
Details
- Language :
- English
- ISSN :
- 10711023
- Volume :
- 13
- Issue :
- 4
- Database :
- Complementary Index
- Journal :
- Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures
- Publication Type :
- Academic Journal
- Accession number :
- 74341133
- Full Text :
- https://doi.org/10.1116/1.588177