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Water soluble conducting polyanilines: Applications in lithography.

Authors :
Angelopoulos, Marie
Patel, Niranjan
Shaw, Jane M.
Labianca, Nancy C.
Rishton, Stephen A.
Source :
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1993, Vol. 11 Issue 6, p2794-2797, 4p
Publication Year :
1993

Details

Language :
English
ISSN :
10711023
Volume :
11
Issue :
6
Database :
Complementary Index
Journal :
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures
Publication Type :
Academic Journal
Accession number :
74339871
Full Text :
https://doi.org/10.1116/1.586604