Back to Search
Start Over
Water soluble conducting polyanilines: Applications in lithography.
- Source :
- Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1993, Vol. 11 Issue 6, p2794-2797, 4p
- Publication Year :
- 1993
Details
- Language :
- English
- ISSN :
- 10711023
- Volume :
- 11
- Issue :
- 6
- Database :
- Complementary Index
- Journal :
- Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures
- Publication Type :
- Academic Journal
- Accession number :
- 74339871
- Full Text :
- https://doi.org/10.1116/1.586604