Back to Search
Start Over
Electron-beam induced tungsten deposition: Growth rate enhancement and applications in microelectronics.
- Source :
- Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1992, Vol. 10 Issue 6, p2690-2694, 5p
- Publication Year :
- 1992
Details
- Language :
- English
- ISSN :
- 10711023
- Volume :
- 10
- Issue :
- 6
- Database :
- Complementary Index
- Journal :
- Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures
- Publication Type :
- Academic Journal
- Accession number :
- 74339377
- Full Text :
- https://doi.org/10.1116/1.586027