Diethylsilane on silicon surfaces: Adsorption and decomposition kinetics.

Authors :: Coon, P. A.
Wise, M. L.
Dillon, A. C.
Robinson, M. B.
George, S. M.
Source :: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1992, Vol. 10 Issue 1, p221-227, 7p
Publication Year :: 1992

Language :: English
ISSN :: 10711023
Volume :: 10
Issue :: 1
Database :: Complementary Index
Journal :: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures
Publication Type :: Academic Journal
Accession number :: 74338843
Full Text :: https://doi.org/10.1116/1.586305