Lithographic applications of conducting polymers.

Authors :: Angelopoulos, Marie
Shaw, Jane M.
Lee, Kam-Leung
Huang, Wu-Song
Lecorre, Marie-Annick
Tissier, Michel
Source :: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1991, Vol. 9 Issue 6, p3428-3431, 4p
Publication Year :: 1991

Language :: English
ISSN :: 10711023
Volume :: 9
Issue :: 6
Database :: Complementary Index
Journal :: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures
Publication Type :: Academic Journal
Accession number :: 74338667
Full Text :: https://doi.org/10.1116/1.585816