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Lithographic applications of conducting polymers.
- Source :
- Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1991, Vol. 9 Issue 6, p3428-3431, 4p
- Publication Year :
- 1991
Details
- Language :
- English
- ISSN :
- 10711023
- Volume :
- 9
- Issue :
- 6
- Database :
- Complementary Index
- Journal :
- Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures
- Publication Type :
- Academic Journal
- Accession number :
- 74338667
- Full Text :
- https://doi.org/10.1116/1.585816