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Electron cyclotron resonance plasma sputtering growth of textured films of c-axis-oriented LiNbO3 on Si(100) and Si(111) surfaces.
- Source :
- Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 2004, Vol. 22 Issue 4, p1793-1798, 6p
- Publication Year :
- 2004
Details
- Language :
- English
- ISSN :
- 07342101
- Volume :
- 22
- Issue :
- 4
- Database :
- Complementary Index
- Journal :
- Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films
- Publication Type :
- Academic Journal
- Accession number :
- 74337655
- Full Text :
- https://doi.org/10.1116/1.1764817