Electron beam fluorescence temperature measurements of N2 in a semiconductor plasma reactor.

Details

Language :

English

ISSN :

07342101

Volume :

22

Issue :

2

Database :

Complementary Index

Journal :

Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films

Publication Type :

Academic Journal

Accession number :

74337493

Full Text :

https://doi.org/10.1116/1.1644113