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Experimental and numerical analyses of electron temperature and density distributions in a magnetic neutral loop discharge plasma.
- Source :
- Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 2001, Vol. 19 Issue 5, p2590-2595, 6p
- Publication Year :
- 2001
Details
- Language :
- English
- ISSN :
- 07342101
- Volume :
- 19
- Issue :
- 5
- Database :
- Complementary Index
- Journal :
- Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films
- Publication Type :
- Academic Journal
- Accession number :
- 74336618
- Full Text :
- https://doi.org/10.1116/1.1397467