Experimental and numerical analyses of electron temperature and density distributions in a magnetic neutral loop discharge plasma.

Details

Language :

English

ISSN :

07342101

Volume :

19

Issue :

5

Database :

Complementary Index

Journal :

Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films

Publication Type :

Academic Journal

Accession number :

74336618

Full Text :

https://doi.org/10.1116/1.1397467