Study of ZrO2 thin films for gate oxide applications.

Authors :: Nam, Seok-Woo
Yoo, Jung-Ho
Kim, Hae-Young
Kang, Sung-Kwan
Ko, Dae-Hong
Yang, Cheol-Woong
Lee, Hoo-Jeong
Cho, Mann-Ho
Ku, Ja-Hum
Source :: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 2001, Vol. 19 Issue 4, p1720-1724, 5p
Publication Year :: 2001

Language :: English
ISSN :: 07342101
Volume :: 19
Issue :: 4
Database :: Complementary Index
Journal :: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films
Publication Type :: Academic Journal
Accession number :: 74336474
Full Text :: https://doi.org/10.1116/1.1351802