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Temperature dependence of structure and electrical properties of germanium-antimony-tellurium thin film.

Authors :
González-Hernández, J.
Prokhorov, E.
Vorobiev, Yu.
Source :
Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 2000, Vol. 18 Issue 4, p1694-1700, 7p
Publication Year :
2000

Details

Language :
English
ISSN :
07342101
Volume :
18
Issue :
4
Database :
Complementary Index
Journal :
Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films
Publication Type :
Academic Journal
Accession number :
74335984
Full Text :
https://doi.org/10.1116/1.582409