X-ray photoelectron spectroscopy studies of modified surfaces of α-Al2O3, SiO2, and Si3N4 by low energy reactive ion beam irradiation.

Details

Language :

English

ISSN :

07342101

Volume :

17

Issue :

6

Database :

Complementary Index

Journal :

Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films

Publication Type :

Academic Journal

Accession number :

74335705

Full Text :

https://doi.org/10.1116/1.582067