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Characterization of thin metal films processed at different temperatures.
- Source :
- Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1999, Vol. 17 Issue 4, p1799-1804, 6p
- Publication Year :
- 1999
Details
- Language :
- English
- ISSN :
- 07342101
- Volume :
- 17
- Issue :
- 4
- Database :
- Complementary Index
- Journal :
- Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films
- Publication Type :
- Academic Journal
- Accession number :
- 74335433
- Full Text :
- https://doi.org/10.1116/1.581893